JPS6233315Y2 - - Google Patents
Info
- Publication number
- JPS6233315Y2 JPS6233315Y2 JP3649683U JP3649683U JPS6233315Y2 JP S6233315 Y2 JPS6233315 Y2 JP S6233315Y2 JP 3649683 U JP3649683 U JP 3649683U JP 3649683 U JP3649683 U JP 3649683U JP S6233315 Y2 JPS6233315 Y2 JP S6233315Y2
- Authority
- JP
- Japan
- Prior art keywords
- holder
- sample
- dryer device
- holder box
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012159 carrier gas Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3649683U JPS59143045U (ja) | 1983-03-14 | 1983-03-14 | リンサ−ドライヤ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3649683U JPS59143045U (ja) | 1983-03-14 | 1983-03-14 | リンサ−ドライヤ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59143045U JPS59143045U (ja) | 1984-09-25 |
| JPS6233315Y2 true JPS6233315Y2 (en]) | 1987-08-26 |
Family
ID=30167166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3649683U Granted JPS59143045U (ja) | 1983-03-14 | 1983-03-14 | リンサ−ドライヤ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59143045U (en]) |
-
1983
- 1983-03-14 JP JP3649683U patent/JPS59143045U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59143045U (ja) | 1984-09-25 |
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